All-dielectric metamaterials have emerged as a promising platform for low-loss and highly efficient terahertz devices. However, existing fabrication methods have difficulty in achieving a good balance between precision and cost. Here, inspired by the nano-template-assisted self-assembly method, we develop a micro-template-assisted self-assembly (MTAS) method to prepare large-scale, high-precision, and flexible ceramic microsphere all-dielectric metamaterials with an area exceeding 900 cm×900 cm. Free from organic solvents, vacuum, and complex equipment, the MTAS method ensures low-cost and environmentally friendly fabrication. The ceramic microsphere resonators can be readily assembled into nearly arbitrary arrangements and complex aggregates, such as dimers, trimers, quadrumers, and chains. Finally, using the heat-shrinkable substrate and dipole coupling effect, a broadband reflector with a bandwidth of 0.15 THz and a reflection of up to 95% is demonstrated. This work provides a versatile and powerful platform for terahertz all-dielectric metamaterials, with potential to be applied in a wide variety of high-efficiency terahertz devices.

When a dielectric meta-atom is placed into a subwavelength metallic aperture, 20-fold enhanced electromagnetic transmission through the aperture is realized at the meta-atom’s resonant frequency. Additionally, when the incident electromagnetic power increases, thermal energy gathered by the meta-atom, which is converted from electromagnetic losses, can cause the meta-atom’s temperature to increase. Because of the high temperature coefficient of the meta-atom’s resonant frequency, this temperature increase causes a blueshift in the transmission peak. Therefore, this frequency-dependent enhanced electromagnetic transmission even produces a nonlinear effect at low incident powers. Over an incident power range from 0 to 20 dBm, measured and simulated spectra near the meta-atom’s resonant frequency show distinctly nonlinear transmission.